简介：TiBCNnanocompositecoatingsweredepositedoncementedcarbideandSi（100）byacathodearcplasmasystem,inwhichTiB2cathodeswereusedinmixturegasesofN2andC2H2.X-raydiffractionshowsthatTiB2andTi2B5peaksenhanceatlowflowratesofC2H2,buttheyshrinkwhentheflowrateisover200seem.AnincreaseofdepositionratewasobtainedfromdifferentTiBCNthicknessesforthesamedepositiontimemeasuredbyscanningelectronmicroscopy.Atomicforcemicroscopyshowsthatthesurfaceroughnessesare10nmand20nmatC2H2flowratesof0-100sccmandof150-300sccm,respectively.HighresolutiontransmissionelectronmicroscopyandX-rayphotoelectronspectroscopyshowthatthecoatingsconsistofnanocrystalphasesTi2B5,TiB2andTiN,andamorphousphasecarbonandBN.Theaveragecrystalsizesembeddedintheamorphousmatricesare200nmand10nmatC2H2flowratesof200sccmand300sccm,respectively.InRamanspectra,theD-andG-bandsincreasewithC2H2flowsatlowflowrates,butweakenathighflowrates.Themicrohardnessofthecoatingsdecreasesfrom28.6GPato20GPaastheC2H2increasesfrom0sccmto300sccm,andtheball-on-diskmeasurementshowsadramaticdecreaseofthefrictioncoefficientfrom0.84to0.13.ThereasonforthereducedhardnessandfrictioncoefficientwiththechangeofC2H2flowratesisdiscussed.