简介：Inthisstudy,theresidualstrainofathinconductivemetalwireonapolymersubstrateafterelectricalfailureismeasuredwithSEMmoir′e.Focusedionbeam(FIB)millingisappliedtofabricatemicronmoir′egratingsonthesurfacesofconstantanwiresandtherandomphaseshiftingtechniqueisusedtoprocessmoir′efringes.Thevirtualstrainmethodisbrieflyintroducedandusedtocalculatetherealstrainofspecimens.Inordertostudytheinfluenceofadefectontheelectricalfailureoftheconstantanwire,experimentswereconductedontwospecimens,onewithacrack,whiletheotheronewithoutanycrack.Bycomparingtheresults,wefoundthatthedefectmakesthecriticalbeamcurrentofelectricalfailuredecrease.Inaddition,thespecimensweresubjectedtocompressionafterelectricalfailure,inagreementwiththeobservedcrackclosureofthespecimen.Thesuccessfulresultsdemonstratethatthemoir′emethodiseffectivetocharacterizethefull-fielddeformationofconstantanwiresonthepolymermembrane,andhasagoodpotentialforfurtherapplicationtothedeformationmeasurementofthinfilms.