Plasma Treatment of Aluminum Using a Surface Barrier Discharge Operated in Air and Nitrogen: Parameter Optimization and Related Effects

(整期优先)网络出版时间:2013-08-18
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Thispaperpresentstheresultsofaluminumsurfacetreatmentbydiffusecoplanarsurfacebarrierdischarge.Thegoalsaretostudytheeffectivenessoftheplasmatreatmentandthedependenceofitsefficiencyonoperationparameters,suchassample-to-electrodedistance,treatmenttimeorgasatmosphere.Threetypesofaluminummaterials(bricks,sheetsandthinfilms)weretestedtoensurethereliabilityofthetreatment.Thechangesinthesurfacepropertieswerecharacterizedbythesurfacefreeenergy,atomicforcemicroscopy,attenuatedtotalreflectanceFouriertransforminfraredspectroscopy(ATRFTIR)andX-rayphotoelectronspec-troscopy(XPS).Theinfluenceofagingeffectonthetreatmentwasalsomeasuredanddiscussed.