简介:摘要:随着微机械加工技术的不断提高,MEMS器件生产工艺也随之得到不断开发与完善。而刻蚀技术是MEMS器件生产过程中的关键技术与核心环节,本文就湿法、干法刻蚀分析了代表性的氢氟酸腐蚀刻蚀和ICP刻蚀方法,就其特点和应用进行列比分析,并结合MEMS器件工程项目生产实际提请建设性意见。
简介:<正>00585UltraBroadbandMEMSSwitchonSiliconandGaAsSubstrates/R.Chan,R.Lesnick,D.Caruthetal(UniversityofIllinois,USA)//GaAsMANTECHConference.2003.—25报导了高可靠dc~110GHz低压毫米波GaAs与Si衬底MEMS开关的性能。当频率高至110GHz,该开关插损小于6dB,隔离度大于15dB,开关寿命大于6.9×10~9循环。文章还介绍了实现超宽带性能及高可靠性所采用的设计方法和制造方法。
简介:AreviewontheresearchofMicroElectromechanicalSystems(MEMS)technologybasedbiomimeticciliaispresented.Biomimeticcilia,enabledbytheadvancementofMEMStechnology,havebeenunderdynamicdevelopmentforthepastdecade.AfterabriefdescriptionofthebackgroundofciliaandMEMStechnology,differentbiomimeticciliaapplicationsarereviewed.Biomimeticciliamicro-actuators,includingmicromachinedpolyimidebimorphbiomimeticciliamicro-actuator,electro-staticallyactuatedpolymerbiomimeticciliamicro-actuator,andmagneticallyactuatednanorodarraybiomimeticciliamicro-actuator,arepresented.Subsequentlymicromachinedunderwaterflowbiomimeticciliamicro-sensorisstudied,followedbyacousticflowmicro-sensor.ThefabricationoftheseMEMS-basedbiomimeticciliadevices,characterizationoftheirphysicalproperties,andtheresultsoftheirapplicationexperimentsarediscussed.
简介:MicroandNanotechnologyareengineeringonanextremelysmallscale.Alreadytheyarebeingappliedtocreatemanynewproducts.Nanotechnologyispredictedtobecomethebasisforremarkablypowerfulandinexpensivecomputers,fundamentallynewmedicaltechnologiesthatcouldsavemillionsoflives,sensorsimportantinmilitaryapplicationaswellasenvironmentalprotection.Themainaimofthisreviewistoconcentrateinformationfromdifferentprintedandonlinesourcesandhelptomakearightdecisioninverydynamicsensormarketaswellasletknowwhatweshouldexpectinthenearestfuture.
简介:PolysiliconMicroelectromechanicalsystems(MEMS)arethesubjectofintensiveresearches.SurfacechemistryandtopographyofaMEMSteststructurefabricatedatSandiaNationalLaboratory,USA,werestudiedbymeansofscanningelectronmicroscopy(SEM),X-rayphotoelectronspectroscopy(XPS)andatomicforcemicroscopy(AFM).XPSC()andSi2,spectrafromthepolysilieoncomponents,siliconnitridesubstrateandareferencesiliconwaferwerecompared.Theresultsconfirmthepresenceofaself-assembledmonolayer(SAM)ontheMEMSsurface.Anisland-likemorphologywasfoundonbothpolysiliconandsiliconnitridesurfacesoftheMEMS.Theislandstaketheformofcaps,beingupto0.5μmindiameterand20nminheight.Itisconcludedthattheco-existenceofcolumnargrowthandequiaxedgrowthduringthelowpressurechemicalvapordeposition(LPCVD)oftheselayersleadstotheobservedmorphologyandtheislandsarecapstothecolumnarstructures.
简介:LIGAtechniquehasbeendevelopedsince1993atBSRF,includingthefabricationofLIGAmask,deepX-rayLithography,electroplating,thepouringmoldingandtheapplicationsinsomefields.TheLIGAmaskwithgoldabsorbingstructuresof20μmthicknessand5μmwidthandKaptonmembraneofaround5μmthicnesshasbeensuccessfullfabricatedandappliedtothedeepX-raylithographywiththePMMAstructureof1mmthicknessorobove.thebeamlineformawigglerisusedforthedeepX-raylithographyofLIGAstatiionandisopentootheinstitutesresearchingthedeepX-raylithography.ThenormalprocessofLIGAtechniquewiththeexceptionofmoldinghasbeenestablishedwiththePMMAstructuresof500μmthicknessatBSRF.ThelargestaspectratioofPMMAstructruescanreachabout50withtheheightof500μmandthelateralsiaeof10μm.Thenickelandcopperstructureswiththetheicknessof0.5mmand1mmhavebeenmadebyusingtheelectroplatingtechnique.TheSU8asaresistmaterialofdeepetchlithographywithUVlightisalsodevelopedinthefabricationofLIGAmaskandsomedevicesatBSRF.Electromagneticsteppingmicromotor,haetexchange,accelerator,structuresusedintheEDM(electrodischargemachinging)arebeingdevelopedforthefutureapplications.
简介:TN2532003021143光纤电压传感器最新进展=Recentadvancesinfiber-opticvoltagesensors[刊,中]/唐丽杰(北方交通大学光波技术研究所.北京(100044)),吴重庆…//半导体光电.—2002,23(4).—228-232综述了光纤电压传感器近年来国内外的最新研究进展,包括可用于SF6绝缘高压开关的光纤电压传感器、频率调制型的光纤电压传感器以及光控灵敏度的光纤电压传感器。介绍了国内在光纤电压传感器方面的研究进展,包括以DSP为信号处理芯片的BGO晶体的光纤电压传感器,以及应用光纤传感器机理来测试脉冲电压和电场的方法,并对光纤电压互感器暂态信号处理的原理进行了研究,试验证明可以满足继电保护的要求。图10参
简介:OnaccountofthemultiformityofMEMSdevices,itisnecessarytointegratewithsomeopticalmeasurementtechniquesformeetingstaticanddynamicunittestrequirements.Inthispaper,anautomatedMEMStestsystemisbuiltofsomecommerciallyavailablecomponentsandinstrumentsbasedonvirtualinstrumenttechnology.Thesystemisintegratedwithstroboscopicimaging,computermicro-vision,microscopicMirauphaseshiftinginterferometry,andlaserDopplervibrometer,andisusedforthemeasurementoffull-viewin-planeandout-of-planegeometricparametersandperiodicalmotionsandsinglespotout-of-planetransientmotion.Thesystemconfigurationandmeasurementmethodsareanalyzed,andsomeapplicationsofthemeasurementofin-planeandout-of-planedimensionsandmotionsweredescribed.Themeasurementaccuracyofin-planedimensionsandout-of-planedimensionalisbetterthan0.2μmand5nmrespectively.Theresolutionofmeasuringin-planeandout-of-planemotionsisbetterthan15nmand2nmrespectively.
简介:摘要:随着时代的发展与科技的进步,互联网各种技术的出现,让电渐渐的成为了不可或缺的“生活必需品”。同时,很多新兴产业也在渐渐成熟,而这些新的产业、新的技术也让我们看到了技术运用在我们生活中的可能性。一个国家的军备力量,在很大程度上代表了一个国家的综合实力,所以这些先进技术在军事上的运用就显得尤为重要。而在20世纪末期出现的MEMS在很大程度上,带电气行业走上了一个新的高度。
简介:InordertoaccomplishreliablemechanicaldesignofMEMS,theinfluencesofsurfaceroughnessandoctadecyltrichlorosilane(OTS)self-assembledmonolayers(SAMs)onthemechanicalpropertiesofmicromachinedpolysiliconfilmsforMEMSareinvestigated.Surfaceeffectonthefracturepropertiesofmicromachinedpolysiliconfilmsisevaluatedwithanewmicrotensiletestingmethodusingamagnet-coilforceactuator.Statisticalanalysisofthesurfaceroughnesseffectsonthetensilestrengthpredicatedthesurfaceroughnesscharacterizationofpolysiliconfilmsbeingtestedandthedirectrelationofthemechanicalpropertieswiththesurfaceroughnessfeatures.Thefracturestrengthdecreaseswiththeincreaseofthesurfaceroughness.Theoctadecyltrichlorosilaneself-assembledmonolayerscoatingleadstoanincreaseoftheaveragefracturestrengthupto32.46%.SurfaceroughnessandthehydrophobicpropertiesofspecimenwhencoatedwithOTSfilmsarethetwomainfactorsinfluencingthetensilestrengthofmicromachinedpolysiliconfilmsforMEMS.