简介:研究表明含氟气体的性质决定了原子氟(F)的转化效率,通常在CxFy气体中x的值越大,氟(F)的转化效率也就会越高。所以C3F8(八氟丙烷)比C2F6(乙氟烷)具有更高的利用效率,更少的PFC(全氟化物)的排放。文章主要研究在以四乙氧基硅烷(TOES)为基础的离子增强化学气相沉积(PlasmaEnhancedChemicalVaporDeposition,PECVD)的清洗制程中,利用分解效率高的C3F8气体取代C2F6气体。通过实验设计(DesignOfExperiment,DOE),调整腔体压力、射频(RF)功率、气体流量等参数,最终得到最优化的新清洗配方。应用到实际的量产中,有效地降低了成本,减少了PFC的排放。
简介:Thestudyofcycliccodesoverringshasgeneratedalotofpublicinterest.Inthispaper,westudycycliccodesandtheirdualcodesovertheringZP2oflengthpe,andfindasetofgeneratorsforthesecodes.Theranksandminimalgeneratorsetsofthesecodesarestudiedaswell,whichplayanimportantroleindecodinganddeterminingthedistancedistributionofcodes.
简介:AlinearizationattackontheKeyStreamGenerator(KSG)ofthemodifiedE0algorithmproposedbyHermelin[ProceedingsofICISC'99,SpringerLNCS1787,2000,17-29]isgiveninthispaper.TheinitialvaluecanberecoveredbyalinearizationattackwithO(260.52)operationsbysolvingaSystemofLinearEquations(SLE)withatmost220.538unknowns.FrederikArmknecht[CryptologyePrintArchive,2002/191]proposedalinearizationattackontheKSGofE0algorithmwith0(270.341)operationsbysolvinganSLEwithatmost224.056unknowns,sothemodificationproposedbyHermelinreducestheabilityofE0toresistthelinearizationattackbycomparingwiththeresultsofFrederikAnnknecht.