简介：WeinvestigatereactivefluorineatomspectroscopiccharacterizationinatmosphericpressureofHe/SF6plasmausingatomicemissionspectrometry.Asinputradiofrequency(RF)powerlevelsareraisedfrom140to220W,theemissionspectraof685.60(3p4D→3s4Ptransition)and739.87nm(3p4P→3s4Ptransition)increasesignificantly.Moreover,anoptimalvalueofSF6volumeconcentrationintheproductionoffluorineradicals,whichis0.8%isachieved.AdditionofcertainamountsofO2intoHe/SF6plasmaresultsinthepromotionofSF6dissociation.EmissionintensitiesoffluorineatomsshowthemaximumattheO2/SF6ratioof0.4.
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