STM observation of pit formation and evolution during the epitaxial growth of Si on Si（001） surface-中国期刊网

摘要 PitformationandsurfacemorphologicalevolutioninSi(001)homoepitaxyareinvestigatedbyusingscanningtunnelingmicroscopy.Anti-phaseboundaryisfoundtogiverisetoinitialgenerationofpitsboundbybunchedDBsteps.Theterracesbreakupandarereducedtoacriticalnucleussizewithpitformation.Duetoanisotropickinetics,adownhillbiasdiffusioncurrent,whichislargeralongthedimerrowsthroughthecentreareaoftheterracethanthroughtheareaclosetotheedge,leadstotheprevalenceofpitsboundby{101}facets.Subsequentannealingresultsinashapetransitionfrom{101}-facetedpitstomulti-facetedpits.

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STM observation of pit formation and evolution during the epitaxial growth of Si on Si（001） surface

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STM observation of pit formation and evolution during the epitaxial growth of Si on Si（001） surface

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